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  • BSI
    BS EN ISO 14644-9:2022 Cleanrooms and associated controlled environments - Assessment of surface cleanliness for particle concentration
    Edition: 2022
    $442.60
    / user per year

Description of BS EN ISO 14644-9:2022 2022

This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D. This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm. The following issues are not considered in this document: —    requirements for the cleanliness and suitability of surfaces for specific processes; —    procedures for the cleaning of surfaces; —     material characteristics; —    references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent; —    selection and use of statistical methods for assessment and testing; —    other characteristics of particles, such as electrostatic charge, ionic charges and microbiological state.

Standard NumberBS EN ISO 14644-9:2022
TitleCleanrooms and associated controlled environments - Assessment of surface cleanliness for particle concentration
StatusDefinitive
Publication Date2022-07-08
ReplacesBS EN ISO 14644-9:2012
Identical National Standard OfEN ISO 14644-9, ISO 14644-9
DescriptorsEnvironmental cleanliness, Contamination, Molecules, Clean rooms, Surfaces, Environment (working), Chemical analysis and testing, Cleaning equipment
ICS13.040.35 Cleanrooms and associated controlled environments
CommitteeLBI/30
ISBN978 0 539 16124 3
PublisherBSI
Pages40

The following editions for this book are also available...

About BSI

BSI Group, also known as the British Standards Institution is the national standards body of the United Kingdom. BSI produces technical standards on a wide range of products and services and also supplies certification and standards-related services to businesses.
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