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  • BSI
    BS EN 62047-22:2014 Semiconductor devices. Micro-electromechanical devices - Electromechanical tensile test method for conductive thin films on flexible substrates
    Edition: 2014
    $281.30
    / user per year

Description of BS EN 62047-22:2014 2014

This part of IEC 62047 specifies a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates. Conductive thin-film structures on flexible substrates are extensively utilized in MEMS, consumer products, and flexible electronics. The electrical behaviours of films on flexible substrates differ from those of freestanding films and substrates due to their interfacial interactions. Different combinations of flexible substrates and thin films often lead to various influences on the test results depending on the test conditions and the interfacial adhesion. The desired thickness of a thin MEMS material is 50 times thinner than that of the flexible substrate, whereas all other dimensions are similar to each other.



Standard NumberBS EN 62047-22:2014
TitleSemiconductor devices. Micro-electromechanical devices - Electromechanical tensile test method for conductive thin films on flexible substrates
StatusDefinitive
Publication Date2014-10-31
Identical National Standard OfIEC 62047-22:2014, EN 62047-22:2014
DescriptorsThin-film devices, Semiconductor technology, Semiconductor devices, Electromechanical devices, Electronic equipment and components, Test equipment, Fatigue testing, Resonance, Integrated circuits, Test specimens, Bend testing, Vibration
ICS31.080.99 Other semiconductor devices, 01.080.99 Other graphical symbols
CommitteeEPL/47
ISBN978 0 580 77555 0
PublisherBSI
Pages14

About BSI

BSI Group, also known as the British Standards Institution is the national standards body of the United Kingdom. BSI produces technical standards on a wide range of products and services and also supplies certification and standards-related services to businesses.
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