ASTM E983-05
Historical Standard: ASTM E983-05 Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
SUPERSEDED (see Active link, below)
ASTM E983
1. Scope
1.1 This guide outlines the origins and manifestations of unwanted electron beam effects in Auger electron spectroscopy (AES).
1.2 Some general guidelines are provided concerning the electron beam parameters which are most likely to produce these effects and suggestions are offered on how to minimize them.
1.3 General classes of materials are identified which are most likely to exhibit unwanted electron beam effects. In addition, a tabulation of some specific materials which have been observed to undergo electron damage effects is provided.
1.4 A simple method is outlined for establishing the existence and extent of these effects during routine AES analysis.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ASTM Standards
E673 Terminology Relating to Surface Analysis
E996 Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
Keywords
Auger electron spectroscopy; charging; electron beam; electron beam damage; Auger electron spectroscopy (AES); Electron beam; Electron radiation; Energy deposition--electron radiation; Surface analysis--spectrochemical analysis; Unwanted electron beam effects;
ICS Code
ICS Number Code 17.180.30 (Optical measuring instruments)
DOI: 10.1520/E0983-05
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