ASTM E766-98
Historical Standard: ASTM E766-98 Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
SUPERSEDED (see Active link, below)
ASTM E766
1. Scope
1.1 This practice is designed to calibrate the magnification of scanning electron microscopes (SEMs) using the National Institute of Standards and Technology (NIST) calibration specimen Standard Reference Material (SRM)484. Since the relationship between true magnification and magnification indicated on the SEM readout may be different at different magnifications, this practice must be applied to each magnification for which true magnification is desired.
1.2 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ASTM Standards
E7 Terminology Relating to Metallography
E29 Practice for Using Significant Digits in Test Data to Determine Conformance with Specifications
E177 Practice for Use of the Terms Precision and Bias in ASTM Test Methods
E456 Terminology Relating to Quality and Statistics
E691 Practice for Conducting an Interlaboratory Study to Determine the Precision of a Test Method
ISO Standard
ISOGuide30:1992 Terms and Definitions Used in Connection with Reference Materials Available from American National Standards Institute (ANSI), 25 W. 43rd St., 4th Floor, New York, NY 10036, http://www.ansi.org.Keywords
calibration; magnification; pitch; scanning electron microscope; Calibration--microscopes; Electron microscopy; Magnification; Scanning electron microscope (SEM);
ICS Code
ICS Number Code 37.020 (Optical equipment)
DOI: 10.1520/E0766-98
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