ASTM E2090-00
Historical Standard: ASTM E2090-00 Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Clean Room Wipers Using Optical and Scanning Electron Microscopy
SUPERSEDED (see Active link, below)
ASTM E2090
1. Scope
1.1 This test method covers testing all wipers used in clean rooms and other controlled environments for characteristics related to particulate cleanliness.
1.2 This test method includes the use of computer-based image analysis and counting hardware and software for the counting of densely particle-laden filters (see ). While the use of this equipment is not absolutely necessary, it is strongly recommended to enhance the accuracy, speed, and consistency of counting.
1.3 The values stated in SI units are to be regarded as the standard.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ASTM Standards
D1193 Specification for Reagent Water
F25 Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas
F312 Test Methods for Microscopical Sizing and Counting Particles from Aerospace Fluids on Membrane Filters
Keywords
cleanroom wipers; contamination control; membrane filter; optical microscopy; particle counting and sizing; particles and fibers; scanning electron microscopy; Cleanrooms (materials/applications); Fiber analysis; Optical electron microscopy; Particle counters/counting; Scanning electron microscope (SEM); Size-diferentiated counting
ICS Code
ICS Number Code 13.040.35 (Cleanrooms and associated controlled environments)
DOI: 10.1520/E2090-00
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