ASTM E1078-97
Historical Standard: ASTM E1078-97 Standard Guide for Procedures for Specimen Preparation and Mounting in Surface Analysis
SUPERSEDED (see Active link, below)
ASTM E1078
1. Scope
1.1 This guide covers specimen preparation and mounting prior to, during, and following surface analysis.
1.2 This guide applies to the following surface analysis disciplines:
1.2.1 Auger electron spectroscopy (AES),
1.2.2 X-ray photoelectron spectroscopy (XPS or ESCA), and
1.2.3 Secondary ion mass spectrometry, SIMS.
1.2.4 Although primarily written for AES, XPS, and SIMS, methods will also apply to many surface sensitive analysis methods such as ion scattering spectrometry, low energy electron diffraction, and electron energy loss spectroscopy, where specimen handling can influence surface sensitive measurements.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ASTM Standards
E673 Terminology Relating to Surface Analysis
E983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
E1127 Guide for Depth Profiling in Auger Electron Spectroscopy
E1523 Guide to Charge Control and Charge Referencing Techniques in X-Ray Photoelectron Spectroscopy
E1829 Guide for Handling Specimens Prior to Surface Analysis
Keywords
auger electron spectroscopy; secondary ion mass spectroscopy; specimen mounting; specimen preparation; specimen treatment; surface analysis; x-ray photoelectron spectroscopy;
ICS Code
ICS Number Code 71.040.50 (Physicochemical methods of analysis)
DOI: 10.1520/E1078-97
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