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BS ISO 5618-2:2024 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for GaN crystal surface defects - Method for determining etch pit density >
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BS ISO 5618-2:2024 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for GaN crystal surface defects - Method for determining etch pit density, 2024
- undefined
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Principle
- 5 Definition of substrate in-plane position
- 6 Procedures for forming an etch pit [Go to Page]
- 7 Method of capturing an etch pit image [Go to Page]
- 8 Method of calculating the etch pit density [Go to Page]
- 9 Categorising the inverted hexagonal pyramidal etch pits by size and calculating their percentages [Go to Page]
- 10 Test report
- Annex A (normative) Verification of dislocation detection by etching
- Annex B (informative) Appropriate inverted hexagonal pyramidal pit size for etch pit counting
- Annex C (normative) Measurement area
- Annex D (normative) Measurement points
- Annex E (normative) Verification of the classifying dislocations by etch pit size
- Bibliography [Go to Page]