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BS IEC 62047-44:2024 Semiconductor devices. Micro-electromechanical devices - Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices >
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BS IEC 62047-44:2024 Semiconductor devices. Micro-electromechanical devices - Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices, 2024
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- CONTENTS
- FOREWORD
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Essential ratings and characteristics [Go to Page]
- Figures [Go to Page]
- 5 Dynamic characteristics [Go to Page]
- 6 Measuring methods [Go to Page]
- Annex A (informative)Work principle and general description of MEMS resonant electric‑field‑sensitive devices [Go to Page]
- Annex B (informative)Sensitive structure and test of typical MEMS resonant electric‑field‑sensitive devices [Go to Page]
