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eLibrary > 23/30479181 DC BS IEC 62047-48. Semiconductor devices. Micro-electromechanical devices - Part 48. Test method of determining solution concentration by optical absorption using MEMS fluidic device >

23/30479181 DC BS IEC 62047-48. Semiconductor devices. Micro-electromechanical devices - Part 48. Test method of determining solution concentration by optical absorption using MEMS fluidic device, 2023

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23/30479181 DC BS IEC 62047-48. Semiconductor devices. Micro-electromechanical devices - Part 48. Test method of determining solution concentration by optical absorption using MEMS fluidic device, 2023

47F_435e_CDV.pdf [Go to Page]
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Test method [Go to Page]
4.1 General [Go to Page]
4.1.1 Molar absorption coefficient, a
4.1.2 Optical path length, b
4.1.3 Absorbance, A
4.1.4 Surface temperature of MEMS fluidic device
4.1.5 Molar concentration, c
4.2 Test specimen [Go to Page]
4.2.1 Configuration of concentration measuring unit for test specimen
4.2.2 Layer stack of the MEMS fluidic device
4.2.3 Size and shape of the micro-channel
4.2.4 Configuration of solution concentration measuring system
4.3 Test procedure
5 Data analysis [Go to Page]
5.1 Calculating results
5.2 Test report
Bibliography [Go to Page]

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23/30479181 DC BS IEC 62047-48. Semiconductor devices. Micro-electromechanical devices - Part 48. Test method of determining solution concentration by optical absorption using MEMS fluidic device, 2023

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